Method and device for monitoring and confirming aging state of semiconductor device and computer readable storage medium

The invention relates to the technical field of semiconductor aging test, and discloses a method for monitoring and confirming the aging state of a semiconductor device, which comprises the followingsteps: continuously acquiring at least one performance parameter of the semiconductor device within a period of time; monitoring the numerical value change of at least one performance parameter; and confirming the aging state of the semiconductor device according to the value change of the performance parameter. By monitoring the numerical change of the combination of one or more performance parameters of the semiconductor device, the aging completion time point can be monitored and confirmed in time, the aging test time is effectively shortened, the product quality is improved, and the test cost is reduced. 本发明涉及半导体老化测试技术领域，公开了一种监测及确认半导体器件老化状态的方法，包括：持续采集一段时间内所述半导体器件的至少一个性能参数；监测至少一个所述性能参数的数值变化；根据所述性能参数的数值变化确认所述半导体器件的老化状态。本发明通过监测半导体器件一种或多种性能参数的组合的数值变化，能够及时监测和确认老化完成的时间点，有效缩短了老化测试的时间，进而提高了产品的质量且降低了测试成本。