Multifunctional vertical zero overlapping scanning interferometry device
The invention discloses a multifunctional vertical zero overlapping scanning interferometry device which comprises a main control unit, a drive control circuit and an air floatation vibration isolation base. A stand column and a four-dimensional motion adjusting platform are arranged on the air floa...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The invention discloses a multifunctional vertical zero overlapping scanning interferometry device which comprises a main control unit, a drive control circuit and an air floatation vibration isolation base. A stand column and a four-dimensional motion adjusting platform are arranged on the air floatation vibration isolation base, a vertical lifting shaft is arranged on the stand column, and a laser wave surface interferometer is arranged on the vertical lifting shaft. A detachable CGH five-dimensional motion combination adjusting platform is arranged on a light output path of the laser wave surface interferometer, the CGH five-dimensional motion combination adjusting platform is located over the four-dimensional motion adjusting platform, and the control end of the CGH five-dimensional motion combination adjusting platform and the control end of the four-dimensional motion adjusting platform are connected with the main control unit through the drive control circuit. And the control end of the laser wave surf |
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