Full-automatic rapid sputter coating production equipment

The invention provides full-automatic rapid sputter coating production equipment which comprises a bottom frame, a feeding rough vacuumizing chamber, a continuous high vacuum chamber, a coating vacuumchamber, a multi-station rotating platform and a full-automatic material taking device used for putt...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CEN DONGYANG, PAN ZHENQIANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides full-automatic rapid sputter coating production equipment which comprises a bottom frame, a feeding rough vacuumizing chamber, a continuous high vacuum chamber, a coating vacuumchamber, a multi-station rotating platform and a full-automatic material taking device used for putting a workpiece into or taking the workpiece out of the feeding rough vacuumizing chamber, the continuous high vacuum chamber is installed on the bottom frame, the feeding rough vacuumizing chamber and the coating vacuum chamber are both arranged on a top cover of the continuous high vacuum chamber, and a first opening communicated with the feeding rough vacuumizing chamber and a second opening communicated with the coating vacuum chamber are formed in the top cover. Rapid air exhaust can be achieved through the feeding rough vacuumizing chamber with the small size, the workpiece can be moved to the coating vacuum chamber for coating in a short time after being moved to the continuous highvacuum chamber from the fe