Method and device for improving metal coverage of DFB laser

The invention provides a method and device for improving metal coverage of a DFB laser. A clamp which can be placed in a coating machine and enables a coated sheet to be placed at a certain inclination angle is provided, the clamp is matched with a planetary turntable to perform electron beam evapor...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHU KAIMING, ZHANG PENG, SHAN ZHIFA, ZHANG YONG, JIANG WEI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a method and device for improving metal coverage of a DFB laser. A clamp which can be placed in a coating machine and enables a coated sheet to be placed at a certain inclination angle is provided, the clamp is matched with a planetary turntable to perform electron beam evaporation, and thus the problem that cracks occur due to the influence of film material accumulation rate and direction in horizontal and vertical coating processes is solved. The device is simple in structure, solves the problem of the step coverage rate of the metal coating process on a non-planar structure, increases the production yield, and is suitable for popularization. 本发明提供一种改善DFB激光器金属覆盖的方法及装置,提供一个可置入镀膜机内并使得镀膜片子呈一定倾斜角度放置的夹具,配合行星式转盘进行电子束蒸镀,改善水平及垂直方向镀膜过程中,因膜料堆积速率及方向影响,而出现的缝隙问题。本申请结构简单,解决了金属镀膜工艺对非平面结构的台阶覆盖率问题,提高了生产良率,适合推广。