Non-resonant vibration auxiliary magneto-rheological polishing device and method for machining optical element

The invention relates to a non-resonant vibration auxiliary magneto-rheological polishing device and method for machining an optical element, and belongs to the field of ultra-precision machining. AnX-direction air floatation guide rail and a Y-direction air floatation guide rail are installed on a...

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Hauptverfasser: LIU AO, SUN EN, FU BIN, LU FAXIANG, LIN JIEQIONG, YU FENGYUAN, KANG MINGSHUO, LIU TUOHAN, SUN JINPENG, ZHANG SEN, MA LIANJIE, GU YAN, LI PENGCHENG, JIANG JIJUN, ZHOU WEIDONG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention relates to a non-resonant vibration auxiliary magneto-rheological polishing device and method for machining an optical element, and belongs to the field of ultra-precision machining. AnX-direction air floatation guide rail and a Y-direction air floatation guide rail are installed on a machine tool frame and drive an element to move in the X-direction and the Y-direction; an Z-direction air floatation guide rail and the Y-direction air floatation guide rail are connected through screws, so that a polishing tool bit moving platform fixed at the bottom end of the Z-direction air floatation guide rail moves in the Z direction; a magnet rotating table is fixed to the machine tool frame, and a generated dynamic magnetic field enables magnetorheological fluid to be subjected to a magnetization reaction to form a magnetic cluster; and a vibration device is installed on the magnet rotating table and drives the element to vibrate in a two-dimensional mode. According to the non-resonant vibration auxiliary