Non-resonant vibration auxiliary magneto-rheological polishing device and method for machining optical element
The invention relates to a non-resonant vibration auxiliary magneto-rheological polishing device and method for machining an optical element, and belongs to the field of ultra-precision machining. AnX-direction air floatation guide rail and a Y-direction air floatation guide rail are installed on a...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to a non-resonant vibration auxiliary magneto-rheological polishing device and method for machining an optical element, and belongs to the field of ultra-precision machining. AnX-direction air floatation guide rail and a Y-direction air floatation guide rail are installed on a machine tool frame and drive an element to move in the X-direction and the Y-direction; an Z-direction air floatation guide rail and the Y-direction air floatation guide rail are connected through screws, so that a polishing tool bit moving platform fixed at the bottom end of the Z-direction air floatation guide rail moves in the Z direction; a magnet rotating table is fixed to the machine tool frame, and a generated dynamic magnetic field enables magnetorheological fluid to be subjected to a magnetization reaction to form a magnetic cluster; and a vibration device is installed on the magnet rotating table and drives the element to vibrate in a two-dimensional mode. According to the non-resonant vibration auxiliary |
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