LASER TRANSFER APPARATUS AND TRANSFER METHOD USING THE SAME
The application is related to a laser transfer apparatus and a method performed by the laser transfer apparatus. The laser transfer apparatus may include: a laser oscillator configured to perform irradiation with a laser beam; a first stage movably disposed below the laser oscillator; a second stage...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The application is related to a laser transfer apparatus and a method performed by the laser transfer apparatus. The laser transfer apparatus may include: a laser oscillator configured to perform irradiation with a laser beam; a first stage movably disposed below the laser oscillator; a second stage movably disposed below the first stage; a flatness measurement sensor; and a controller. The controller may be configured to control, once a transfer substrate on which a plurality of light emitting diodes (LEDs) are arranged is loaded on the first stage, and a target substrate is loaded on the second stage, the flatness measurement sensor to measure flatness of each of the transfer substrate and the target substrate, and adjust a height of at least one of the first stage or the second stage based on the flatness.
本申请涉及激光转印装置及由该装置执行的方法。激光转印装置可以包括:激光振荡器,配置为用激光束执行照射;第一级,可以移动地设置在激光振荡器下方;第二级,可以移动地设置在第一级下方;平坦度测量传感器;以及控制器。控制器可以配置为在将其上布置了多个发光二极管(LED)的转印基板装载在第一级上,且将目标基板装载在第二级上之后,控制平坦度测量传感器以测量转印基板和目标基板中的每一个的平坦度,并且基于平坦度调节第一 |
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