Microwave/millimeter wave integrated circuit chip internal detection device

The invention relates to a microwave/millimeter wave integrated circuit chip internal detection device which is realized through the following technical scheme: the microwave/millimeter wave integrated circuit chip internal detection device comprises a microwave/millimeter wave signal conversion module for converting specified parameters of microwave/millimeter wave signals into measurable parameters; a reference parameter editing module used for editing reference parameters; a comparison module used for comparing the reserved reference parameters with the measurable parameters and generatinga comparison result; and a judgment circuit module used for receiving the comparison result generated by the comparison module, judging in combination with the requirements of the actual chip on the performance and the function of a microwave/millimeter wave circuit, and outputting the final result out of the chip in a digital signal form or an analog signal form. According to the invention, the microwave/millimeter wave