Magnetic adsorption local vacuum evaporation method

The invention discloses a magnetic adsorption local vacuum evaporation method. The magnetic adsorption local vacuum evaporation method specifically comprises the following steps that before vacuum evaporation, an evaporation body is fixed to a substrate, a magnetic pattern is attracted to a set area...

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Bibliographische Detailangaben
Hauptverfasser: HE XINHAI, ZHOU GUANGRUI, LIANG HUANHUAN, NING ZHIXIN, LIANG JUNHAO, LIU BAOQI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a magnetic adsorption local vacuum evaporation method. The magnetic adsorption local vacuum evaporation method specifically comprises the following steps that before vacuum evaporation, an evaporation body is fixed to a substrate, a magnetic pattern is attracted to a set area on the surface of the evaporation body by using a magnetic field, the surface of the evaporation body is completely covered with a metal film by using the vacuum evaporation method, and after an evaporation process is finished, the magnetic field is removed and the magnetic pattern is taken down tofinish the local evaporation, a process of cleaning a protective coating with traditional chemicals can be omitted, the local evaporation process can be completed quickly and efficiently, the problemof waste water treatment is avoided, the cost is reduced, and the method is a green and pollution-free local evaporation method. 本发明公开了一种磁吸附局部真空蒸镀的方法,具体包括以下步骤:真空蒸镀前,将蒸镀体与基板固定,然后利用磁场将磁性图案吸附于蒸镀体表面的设定区域,通过真空蒸镀方法使蒸镀体表面完全被金属薄膜覆盖,蒸