SEMICONDUCTOR WAFER MASS METROLOGY APPARATUS AND SEMICONDUCTOR WAFER MASS METROLOGY METHOD

A semiconductor wafer mass metrology apparatus comprising: a measurement chamber for measuring the weight and/or the mass of a semiconductor wafer; a first temperature changing part for changing a temperature of the semiconductor wafer before the semiconductor wafer is transported into the measurement chamber; and a first temperature sensor for sensing a first temperature, wherein the first temperature is: a temperature of the first temperature changing part; or a temperature of the semiconductor wafer when the semiconductor wafer is on the first temperature changing part,or when the semiconductor wafer leaves the first temperature changing part. 一种半导体晶片质量计量装置，其包括：测量室，其用于测量半导体晶片的重量和/或质量；第一温度改变部件，其用于在将所述半导体晶片传送到所述测量室之前改变所述半导体晶片的温度；以及第一温度传感器，其用于感测第一温度，其中所述第一温度为：所述第一温度改变部件的温度；或当所述半导体晶片在所述第一温度改变部件上时，或当所述半导体晶片离开所述第一温度改变部件时，所述半导体晶片的温度。