CARRIER FOR A SUBSTRATE AND METHOD FOR CARRYING A SUBSTRATE

A carrier configured for holding and transporting a substrate in a transport direction in a vacuum processing system and a method for carrying a substrate in a transport direction during a depositionprocess in a deposition chamber with a carrier is described. The carrier includes two side edges oppo...

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Bibliographische Detailangaben
1. Verfasser:	LINDENBERG RALPH
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	A carrier configured for holding and transporting a substrate in a transport direction in a vacuum processing system and a method for carrying a substrate in a transport direction during a depositionprocess in a deposition chamber with a carrier is described. The carrier includes two side edges opposing each other, a joining structure arranged between the side edges, having a flat structure comprising a plurality of apertures, each exposing the same substrate and an aperture ratio of at least 0.5, and a holding assembly configured for holding the substrate adjacent to the joining structure. 描述了一种经构造以用于在真空处理系统中在传送方向中保持和传送基板的载体和用于在沉积腔室中的沉积工艺期间在传送方向中使用载体承载基板的方法。所述载体包括彼此相对的两个侧边缘；连结结构，布置于所述侧边缘之间，所述连结结构具有平面结构，所述平面结构包括多个孔及至少0.5的开口率，这些孔的各者暴露相同的基板；以及保持组件，经构造以用于将基板保持为相邻于连结结构。