Cooling rotary disc mechanism for vacuum coating

The invention discloses a cooling rotary disc mechanism for vacuum coating. The cooling rotary disc mechanism for vacuum coating comprises magnetic fluid, a main shaft, a freezing rotary disc, a heatconduction pressing plate, a cooling pipeline, a locking flange, a rotary joint, a water inlet pipeli...

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1. Verfasser: FU QIYU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a cooling rotary disc mechanism for vacuum coating. The cooling rotary disc mechanism for vacuum coating comprises magnetic fluid, a main shaft, a freezing rotary disc, a heatconduction pressing plate, a cooling pipeline, a locking flange, a rotary joint, a water inlet pipeline, a water outlet pipeline, a cavity bottom plate and a driving assembly, wherein the main shaft is inserted into a rotary part of the magnetic fluid; the freezing rotary disc is mounted at the top of the main shaft; a cooling channel which is arranged in a disc shape is arranged on the upper endface of the freezing rotary disc; the heat conduction pressing plate is packaged at the upper end of the freezing rotary disc; the main shaft is internally provided with the cooling pipeline communicating with the two ends of the cooling channel; the bottom of the main shaft is fixedly connected with the rotary part of the rotary joint; the water inlet pipeline and the water outlet pipeline, whichcommunicate with the cooli