Light path stabilizing structure suitable for straight pipe evaporation device

The invention discloses a light path stabilizing structure suitable for a straight pipe evaporation device, which comprises an air disturbance compensation mechanism and a light path drift amount detection mechanism, the air disturbance compensation mechanism comprises a quick reflector I and a quic...

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Bibliographische Detailangaben
Hauptverfasser: SUN GUIXIA, LING FEITONG, XIONG MING, LIU TAO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a light path stabilizing structure suitable for a straight pipe evaporation device, which comprises an air disturbance compensation mechanism and a light path drift amount detection mechanism, the air disturbance compensation mechanism comprises a quick reflector I and a quick reflector II arranged on the reflection light path of the quick reflector I, and the quick reflector I is arranged on the emission light path of a laser; the light path drift detection mechanism comprises a spectroscope arranged on a reflection light path of the quick reflector II and a position detector arranged on a reflection pipeline of the spectroscope; and a collimation adjusting system is arranged between the quick reflector I and the quick reflector II. The light path stabilizing structure is used for stabilizing the laser light path passing through the straight pipe evaporation device, improving the laser collimation precision, and reducing the light path offset caused by the fluctuation of the laser, th