Preparation method of glass micro-channel radiator for gallium nitride power amplifier chip

The invention discloses a preparation method of a glass micro-channel radiator for a gallium nitride power amplifier chip, which comprises the following steps: preparing at least three photolithographic glass wafers, namely a glass wafer A, a glass wafer B and a glass wafer C; etching a TGV through...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	QIN YUELI, WANG CHUNFU, LI YANRUI, LI YANGYANG, ZHANG JIAN, WANG WENBO, LU QIAN, XIANG WEIWEI, JIANG MIAOMIAO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SEMICONDUCTOR DEVICES TRANSPORTING
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