SUBSTRATE PROTECTION SHEET

One embodiment of the present invention provides a substrate protection sheet arranged between a vacuum chuck and a substrate. The substrate protection sheet according to one embodiment comprises a breathable soft sheet and a breathable hard sheet attached to one surface of the breathable soft sheet...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	SON SANG-HO, SHIN JANGOL
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	LAYERED PRODUCTS LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM PERFORMING OPERATIONS TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	One embodiment of the present invention provides a substrate protection sheet arranged between a vacuum chuck and a substrate. The substrate protection sheet according to one embodiment comprises a breathable soft sheet and a breathable hard sheet attached to one surface of the breathable soft sheet, wherein the breathable soft sheet has a plurality of through-holes. The substrate protection sheetof the present invention can enhance the adsorption strength of the substrate with respect to the vacuum chuck. 本发明的一实施例提供一种基板保护片，配置在真空吸盘和基板之间。一实施例的基板保护片的特征在于包括：通气性软片；以及通气性硬片，附着于通气性软片的一面，通气性软片具备多个通孔。根据本发明的基板保护片，能够提高真空吸盘对基板的吸附力。