Microparticle detection device

The invention provides a microparticle detection device which is used for detecting a plurality of microparticles of a target object. The microparticle detection device comprises a light source, an optical system and an image acquisition device. Light source adapted to provide an illumination beam....

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HUANG GUANXUN, ZHANG XUNHAO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a microparticle detection device which is used for detecting a plurality of microparticles of a target object. The microparticle detection device comprises a light source, an optical system and an image acquisition device. Light source adapted to provide an illumination beam. The optical system is disposed on a transmission path of the illumination beam. The optical system includes an optical focusing element having a depth-of-field value. The optical system provides a detection light beam to a target object to generate an image light beam. The image acquisition device is disposed on a transmission path of the image light beam. The detection light beam is a collimated light beam, and the focal plane of the optical focusing element is not overlapped with the surface with the microparticles in the target object. 本发明提供一种微粒子检测装置,用于检测目标物件的多个微粒子。微粒子检测装置包括光源、光学系统以及图像获取装置。光源适于提供照明光束。光学系统配置在照明光束的传递路径上。光学系统包括光学聚焦元件,具有景深值。光学系统提供检测光束至目标物件上以产生图像光束。图像获取装置配置在图像光束的传递路径上。检测光束为准直光束,且光学聚焦元件的焦平面与目标物件中具有微粒子