Micro-nano manufacturing device

The invention relates to the technical field of nanometer, and discloses a micro-nano manufacturing device. The method comprises the following steps of providing pattern information of a to-be-formedpattern by using a template providing module; fixing a substrate on a motion table unit of a motion module, and driving the substrate to move according to the pattern information through the motion module; positioning the manufacturing module on the substrate to a position where the to-be-formed pattern needs to be formed, and charges are written in to form the to-be-formed pattern. The particle introduction module introduces nanoparticles into the area where the to-be-formed pattern is located to form a to-be-formed structure. The micro-nano manufacturing device provided by the invention cancomplete electrostatic nano-printing manufacturing of micro-nano structures from nanoscale to centimeter level and above, solves the problem that large-scale and cross-scale structures cannot be manufactured by a scanning prob