Device and method for measuring temperature of femtosecond laser processing material based on thermodynamic method

The invention discloses a device and a method for measuring material temperature in a femtosecond laser processing process. The device is suitable for temperature measurement in the femtosecond lasermaterial processing process. The device is simple, convenient to operate and accurate and reliable in...

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Bibliographische Detailangaben
Hauptverfasser: ZHAO QUANZHONG, XIA ZHAOYUAN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a device and a method for measuring material temperature in a femtosecond laser processing process. The device is suitable for temperature measurement in the femtosecond lasermaterial processing process. The device is simple, convenient to operate and accurate and reliable in measurement. According to the design of the device, the basic principle of thermodynamics is utilized, the heat generated by femtosecond laser is obtained through conversion by measuring the total energy of femtosecond laser pulses entering a cavity and the gas acting amount in the machining process, and the temperature in the material removing process is further calculated. The device has good air tightness and can accurately capture the volume of gas instantaneously expanded due to materialgasification in the femtosecond laser processing process. Through accumulative measurement, the accuracy and reliability of measurement are improved. Through the design of the upper air valve and thelower air valve, it is guar