CHROMATIC CONFOCAL MEASURING DEVICE
A color confocal measurement device for measuring distances and/or thicknesses at a plurality of locations, comprises a light source emitting multicolor measurement light through a light exit surface,and comprises at least one first confocal aperture through which the measurement light passes, and t...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | A color confocal measurement device for measuring distances and/or thicknesses at a plurality of locations, comprises a light source emitting multicolor measurement light through a light exit surface,and comprises at least one first confocal aperture through which the measurement light passes, and the at least one first confocal aperture comprises a plurality of punctiform openings or at least one slit-shaped opening. The color confocal measurement device further includes imaging optics arranged to cause the color focus shift of the measurement light and image the first confocal aperture in the measurement space, wherein different wavelengths are focused at different heights. A first receiving and evaluating unit is designed to measure the intensity of the measurement light reflected by the measurement object as a function of the wavelength at the reflection point on the measurement object and the lateral position of the reflection point on the measurement object, and to thereby determine the distance and/or |
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