Vacuum bending type bent crystal

The invention discloses a vacuum bending type bent crystal, which is characterized by comprising a shell, wherein an X-ray incident port is formed in the shell, an X-ray transmission film, a single crystal wafer and a curved surface substrate are sequentially arranged from the X-ray incident port to...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WENG ZUQIAN, LIU PENG, LIU XING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a vacuum bending type bent crystal, which is characterized by comprising a shell, wherein an X-ray incident port is formed in the shell, an X-ray transmission film, a single crystal wafer and a curved surface substrate are sequentially arranged from the X-ray incident port to the interior of the shell in the X-ray incident direction, the X-ray transmission film, the side wall of the shell and the bottom surface of the shell form a sealed cavity, the sealed cavity is provided with an exhaust port used for vacuumizing, negative pressure is generated in the sealed cavity when crystal bending is carried out, and the X-ray transmission film is flexibly attached to the single crystal wafer and the curved surface substrate through atmospheric pressure. According to the invention, by adopting a vacuum bending mode, various single crystal wafers can be bent, so that the material selection of crystal bending is greatly expanded; stress is flexibly applied to the single crystal wafer and the curv