Process tool and method of capturing image data therein

In some embodiments, the present disclosure relates to a process tool which includes a housing that defines a vacuum chamber. A wafer chuck is in the housing and a carrier wafer is on the wafer chuck.A camera is integrated on the wafer chuck such that the camera faces a top of the housing. The camera is configured to wirelessly capture images of an object of interest within the housing. Outside of the housing is a wireless receiver. The wireless receiver is configured to receive the images from the camera while the vacuum chamber is sealed. 在一些实施例中，本公开涉及一种工艺工具，所述工艺工具包括界定真空室的壳体。晶圆夹盘位于所述壳体中且载体晶圆位于所述晶圆夹盘上。相机集成在所述载体晶圆上以使所述相机面对所述壳体的顶部。所述相机被配置成以无线方式拍摄所述壳体内的所关注物体的图像。位于所述壳体外部的是无线接收器。所述无线接收器被配置成在所述真空室被密封的同时从所述相机接收所述图像。