PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS, AND MOBILE BODY

The present invention provides a physical quantity sensor, an electronic apparatus, and a mobile body that can reduce occurrence of noise and can exert excellent detection accuracy. The physical quantity sensor (1) includes: an angular velocity detection element (4); an acceleration detection elemen...

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1. Verfasser: IDE TSUGIO
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The present invention provides a physical quantity sensor, an electronic apparatus, and a mobile body that can reduce occurrence of noise and can exert excellent detection accuracy. The physical quantity sensor (1) includes: an angular velocity detection element (4); an acceleration detection element (3); a bonding wire (BY1) for propagating a detection signal of the acceleration detection element(3); and a shield portion (7) situated between the angular velocity detection element (4) and the bonding wire BY1 and connected with fixed electric potential. In addition, the angular velocity detection element (4) and the acceleration detection element (3) are arranged offset in a height direction, and at least part of the shield portion (7) is arranged between them. 本发明提供一种能够减少噪声的产生、且发挥出卓越的检测精度的物理量传感器、电子设备以及移动体。物理量传感器(1)具有:角速度检测元件(4)、加速度检测元件(3)、对加速度检测元件(3)的检测信号进行传输的接合引线(BY1)、位于角速度检测元件(4)与接合引线(BY1)之间并与固定电位连接的屏蔽部(7)。此外,角速度检测元件(4)和加速度检测元件(3)以在高度方向上错开的方式而被配置,并且在角速度检测元件(4)和加速度检测元件(3)之间配置有屏蔽部(7)的至少一部分。