Appearance inspection management system, appearance inspection management device, appearance inspection management method, and storage medium

The invention provides an appearance inspection management system, device and method, and a storage medium, which support a user to perform screening of characteristic quantities used as defect determination indexes in an appearance inspection device and setting of a threshold value of each characte...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: NAKADA MASAHIRO, MATSUI MASAHIKO, MIYATA YOSHIAKI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides an appearance inspection management system, device and method, and a storage medium, which support a user to perform screening of characteristic quantities used as defect determination indexes in an appearance inspection device and setting of a threshold value of each characteristic quantity. The appearance inspection management system includes: an appearance inspection unitthat inspects a defect of an object to be inspected based on a feature amount acquired from an image obtained by capturing an image of the object to be inspected; a display component; a storage unitthat stores defect image data including at least information of a feature amount obtained from an image of a portion determined by the appearance inspection unit to be a defect of the object to be inspected; a feature amount distribution map creation unit for creating a plurality of feature amount distribution maps in which feature amount information is mapped to a predetermined coordinate system;and a feature amount selec