METHOD AND OPTICAL ARRANGEMENT FOR ASCERTAINING A RESULTANT POWER OF RADIATION IN A SAMPLE PLANE

A method for ascertaining a resultant power of radiation in a sample plane (8) of an optical arrangement. In a step A, a current configuration of optical elements in a beam path of the optical arrangement is captured. In a step B, radiation is provided and directed into the sample plane (8) along the beam path. At least one measured value of the power of the radiation in the sample plane (8) is captured as resultant power in step C and the measured values in respect of the respectively current configuration are stored in a step D. Steps A to D are repeated for at least one further current configuration. An optical arrangement for ascertaining a resultant power of radiation in a sample plane (8) is provided. 本发明涉及一种确定在光学布置的样品平面(8)中的辐射的合成功率的方法。步骤A中，捕获在光学布置的束路径中的光学元件的当前配置。步骤B中，提供辐射且将辐射沿着所述束路径引导到样品平面(8)中。步骤C中，捕获在样品平面(8)中的辐射的功率的至少一个测量值作为合成功率；以及步骤D中，存储与所相应的当前配置相关的测量值。对于至少一个其他当前配置，重复步骤A至D。此外，本发明还涉及一种确定在样品平面(8)中的辐射的合成功率的光学布置。