Temperature sensor

The invention discloses a temperature sensor, and the sensor comprises a substrate, two thermally-driven V-shaped beam structures, a frame-shaped mechanical metamaterial structure and a strain sensitive film. The two thermally-driven V-shaped beam structures are located on the two sides of the frame...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HAN LEI, WU CHENGGEN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a temperature sensor, and the sensor comprises a substrate, two thermally-driven V-shaped beam structures, a frame-shaped mechanical metamaterial structure and a strain sensitive film. The two thermally-driven V-shaped beam structures are located on the two sides of the frame-shaped mechanical metamaterial structure respectively. The strain sensitive film is located in thecenter of the frame-shaped mechanical metamaterial structure. When the ambient temperature changes, the suspended thermally-driven V-shaped beam expands or contracts under the influence of the temperature, the rigid insulation connecting wire is driven to drive the frame-shaped mechanical metamaterial structure to expand or contract in multiple directions, and expansion or contraction of the mechanical metamaterial structure is transmitted to the strain sensitive film through the rigid insulation connecting wire; the strain sensitive film converts multi-directional strain into resistance valuechange, and the ambient t