Vacuum degree real-time monitoring device for vacuumizing operation
The invention discloses a vacuum degree real-time monitoring device for vacuumizing operation. The problem that the vacuum degree of an air chamber cannot be accurately monitored in real time in the prior art is solved. The device comprises an adapter, wherein a GIS air chamber is directly connected...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a vacuum degree real-time monitoring device for vacuumizing operation. The problem that the vacuum degree of an air chamber cannot be accurately monitored in real time in the prior art is solved. The device comprises an adapter, wherein a GIS air chamber is directly connected with a vacuum pump unit through the adapter; a standard gas chamber special joint, used for connecting a gas outlet of the GIS gas chamber with a vacuum pipeline of the vacuum pump unit; and an electronic vacuum meter, arranged on the adapter and used for monitoring the vacuum degree of the GIS airchamber. The monitoring device replaces an original mode that the pressure in the air chamber is observed through a vacuum meter on the vacuum pump unit, measurement errors caused by pipeline pressure difference are eliminated, unnecessary vacuumizing time is shortened, and vacuumizing operation efficiency is improved.
本发明公开了一种抽真空作业真空度实时监测装置。为了克服现有技术无法精确地实时监测气室的真空度问题;本发明包括转接头,GIS气室直接通过转接头与真空泵机组相连;标准气室专用接头,用于连接GIS气室的出气口和真 |
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