Cooling device and vertical furnace system

The invention provides a cooling device and a vertical furnace system. The cooling device comprises a liquid supply device, a liquid return device and a plurality of coil pipes, wherein the coil pipesare arranged on the outer wall of a vertical furnace body from the top to the bottom of the vertical...

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1. Verfasser: YAN SHIQUAN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a cooling device and a vertical furnace system. The cooling device comprises a liquid supply device, a liquid return device and a plurality of coil pipes, wherein the coil pipesare arranged on the outer wall of a vertical furnace body from the top to the bottom of the vertical furnace body in the vertical direction, liquid inlets of the coil pipes are located in the top ofthe vertical furnace body, liquid outlets of the coil pipes are located in the bottom of the vertical furnace body, the liquid supply device is positioned at the top of the vertical furnace body, is connected with the liquid inlets of the coil pipes and is used for conveying cooling liquid into the coil pipes, and the liquid return device is located at the bottom of the vertical furnace body, is connected with liquid outlets of the coil pipes and is used for recycling cooling liquid flowing out of the coil pipes. According to the cooling device, the purpose of quickly cooling the vertical furnace body can be achieved.