SYSTEM FOR TESTING MIRROR SUCH AS COLLECTOR MIRROR AND METHOD OF TESTING MIRROR SUCH AS COLLECTOR MIRROR

A system configured for testing a collector mirror having a first focus and a second focus is disclosed, the system comprises: a test radiation sub-system operative to project test radiation from thesecond focus onto the collector mirror; a sensor sub-system operative to receive test radiation reflected off the collector mirror towards the first focus; and a radiation limiter sub-system operativeto limit the test radiation as received by the sensor to test radiation reflected off a limited portion of the collector mirror; a control sub-system operative to control a movement of the radiationlimiter sub-system along a sequence of different positions, thereby limiting the test radiation as received by the sensor to test radiation reflected off a respective sequence of different limited portions of the collector mirror. 公开一种被配置成测试收集器反射镜的系统，所述收集器反射镜具有第一焦点和第二焦点，所述系统包括：测试辐射子系统，所述测试辐射子系统能够操作以将测试辐射从所述第二焦点投影至所述收集器反射镜上；传感器子系统，所述传感器子系统能够操作以接收从所述收集器反射镜朝向所述第一焦点反射的测试辐射；和辐射限制器子系统，所述辐射限制器子系统能够操作以将由所述传感器接收的所述测试辐射限制至从所述收集器反射镜的受