TUBULAR LINEAR ACTUATOR, PATTERNING DEVICE MASKING DEVICE AND LITHOGRAPHIC APPARATUS
The present invention provides a tubular linear actuator, comprising: a tubular coil assembly comprising multiple tubular coils arranged next to each other in longitudinal direction of the tubular linear actuator and concentric with respect to a longitudinal axis of the tubular linear actuator, and...
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| creator | VAN HORNE EDWIN FISCHER OLOF MARTINUS JOSEPHUS VERWEIJ ANTONIE HENDRIK HEIJMANS PETER MICHEL SILVESTER MARIA KIMMAN MAARTEN HARTGER |
| description | The present invention provides a tubular linear actuator, comprising: a tubular coil assembly comprising multiple tubular coils arranged next to each other in longitudinal direction of the tubular linear actuator and concentric with respect to a longitudinal axis of the tubular linear actuator, and a magnet assembly comprising a series of permanent magnets with alternating polarization direction extending in the longitudinal direction, wherein the magnet assembly is at least partially arranged in the coil assembly and movably with respect to the coil assembly, wherein the tubular coils comprise edge windings.
本发明提供一种管状线性致动器，该管状线性致动器包括：管状线圈组件，其包括在管状线性致动器的纵向方向上彼此相邻并且相对于管状线性致动器的纵向轴线同心地布置的多个管状线圈；以及磁体组件，其包括在纵向方向上延伸并且具有交替极化方向的一系列永磁体，其中磁体组件至少部分布置在线圈组件中并且相对于线圈组件可移动，其中管状线圈包括边缘绕组。 |
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本发明提供一种管状线性致动器，该管状线性致动器包括：管状线圈组件，其包括在管状线性致动器的纵向方向上彼此相邻并且相对于管状线性致动器的纵向轴线同心地布置的多个管状线圈；以及磁体组件，其包括在纵向方向上延伸并且具有交替极化方向的一系列永磁体，其中磁体组件至少部分布置在线圈组件中并且相对于线圈组件可移动，其中管状线圈包括边缘绕组。</description><language>chi ; eng</language><subject>APPARATUS SPECIALLY ADAPTED THEREFOR ; CINEMATOGRAPHY ; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ; DYNAMO-ELECTRIC MACHINES ; ELECTRICITY ; ELECTROGRAPHY ; GENERATION ; HOLOGRAPHY ; MATERIALS THEREFOR ; ORIGINALS THEREFOR ; PHOTOGRAPHY ; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES ; PHYSICS</subject><creationdate>2020</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20201204&DB=EPODOC&CC=CN&NR=112041748A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20201204&DB=EPODOC&CC=CN&NR=112041748A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>VAN HORNE EDWIN</creatorcontrib><creatorcontrib>FISCHER OLOF MARTINUS JOSEPHUS</creatorcontrib><creatorcontrib>VERWEIJ ANTONIE HENDRIK</creatorcontrib><creatorcontrib>HEIJMANS PETER MICHEL SILVESTER MARIA</creatorcontrib><creatorcontrib>KIMMAN MAARTEN HARTGER</creatorcontrib><title>TUBULAR LINEAR ACTUATOR, PATTERNING DEVICE MASKING DEVICE AND LITHOGRAPHIC APPARATUS</title><description>The present invention provides a tubular linear actuator, comprising: a tubular coil assembly comprising multiple tubular coils arranged next to each other in longitudinal direction of the tubular linear actuator and concentric with respect to a longitudinal axis of the tubular linear actuator, and a magnet assembly comprising a series of permanent magnets with alternating polarization direction extending in the longitudinal direction, wherein the magnet assembly is at least partially arranged in the coil assembly and movably with respect to the coil assembly, wherein the tubular coils comprise edge windings.
本发明提供一种管状线性致动器，该管状线性致动器包括：管状线圈组件，其包括在管状线性致动器的纵向方向上彼此相邻并且相对于管状线性致动器的纵向轴线同心地布置的多个管状线圈；以及磁体组件，其包括在纵向方向上延伸并且具有交替极化方向的一系列永磁体，其中磁体组件至少部分布置在线圈组件中并且相对于线圈组件可移动，其中管状线圈包括边缘绕组。</description><subject>APPARATUS SPECIALLY ADAPTED THEREFOR</subject><subject>CINEMATOGRAPHY</subject><subject>CONVERSION OR DISTRIBUTION OF ELECTRIC POWER</subject><subject>DYNAMO-ELECTRIC MACHINES</subject><subject>ELECTRICITY</subject><subject>ELECTROGRAPHY</subject><subject>GENERATION</subject><subject>HOLOGRAPHY</subject><subject>MATERIALS THEREFOR</subject><subject>ORIGINALS THEREFOR</subject><subject>PHOTOGRAPHY</subject><subject>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</subject><subject>PHYSICS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2020</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZAgJCXUK9XEMUvDx9HMFUo7OIaGOIf5BOgoBjiEhrkF-nn7uCi6uYZ7Orgq-jsHeSFxHPxegrhAPf_cgxwAPT2cFx4AAxyDHkNBgHgbWtMSc4lReKM3NoOjmGuLsoZtakB-fWlyQmJyal1oS7-xnaGhkYGJobmLhaEyMGgA0BTAk</recordid><startdate>20201204</startdate><enddate>20201204</enddate><creator>VAN HORNE EDWIN</creator><creator>FISCHER OLOF MARTINUS JOSEPHUS</creator><creator>VERWEIJ ANTONIE HENDRIK</creator><creator>HEIJMANS PETER MICHEL SILVESTER MARIA</creator><creator>KIMMAN MAARTEN HARTGER</creator><scope>EVB</scope></search><sort><creationdate>20201204</creationdate><title>TUBULAR LINEAR ACTUATOR, PATTERNING DEVICE MASKING DEVICE AND LITHOGRAPHIC APPARATUS</title><author>VAN HORNE EDWIN ; FISCHER OLOF MARTINUS JOSEPHUS ; VERWEIJ ANTONIE HENDRIK ; HEIJMANS PETER MICHEL SILVESTER MARIA ; KIMMAN MAARTEN HARTGER</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN112041748A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2020</creationdate><topic>APPARATUS SPECIALLY ADAPTED THEREFOR</topic><topic>CINEMATOGRAPHY</topic><topic>CONVERSION OR DISTRIBUTION OF ELECTRIC POWER</topic><topic>DYNAMO-ELECTRIC MACHINES</topic><topic>ELECTRICITY</topic><topic>ELECTROGRAPHY</topic><topic>GENERATION</topic><topic>HOLOGRAPHY</topic><topic>MATERIALS THEREFOR</topic><topic>ORIGINALS THEREFOR</topic><topic>PHOTOGRAPHY</topic><topic>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</topic><topic>PHYSICS</topic><toplevel>online_resources</toplevel><creatorcontrib>VAN HORNE EDWIN</creatorcontrib><creatorcontrib>FISCHER OLOF MARTINUS JOSEPHUS</creatorcontrib><creatorcontrib>VERWEIJ ANTONIE HENDRIK</creatorcontrib><creatorcontrib>HEIJMANS PETER MICHEL SILVESTER MARIA</creatorcontrib><creatorcontrib>KIMMAN MAARTEN HARTGER</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>VAN HORNE EDWIN</au><au>FISCHER OLOF MARTINUS JOSEPHUS</au><au>VERWEIJ ANTONIE HENDRIK</au><au>HEIJMANS PETER MICHEL SILVESTER MARIA</au><au>KIMMAN MAARTEN HARTGER</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>TUBULAR LINEAR ACTUATOR, PATTERNING DEVICE MASKING DEVICE AND LITHOGRAPHIC APPARATUS</title><date>2020-12-04</date><risdate>2020</risdate><abstract>The present invention provides a tubular linear actuator, comprising: a tubular coil assembly comprising multiple tubular coils arranged next to each other in longitudinal direction of the tubular linear actuator and concentric with respect to a longitudinal axis of the tubular linear actuator, and a magnet assembly comprising a series of permanent magnets with alternating polarization direction extending in the longitudinal direction, wherein the magnet assembly is at least partially arranged in the coil assembly and movably with respect to the coil assembly, wherein the tubular coils comprise edge windings.
本发明提供一种管状线性致动器，该管状线性致动器包括：管状线圈组件，其包括在管状线性致动器的纵向方向上彼此相邻并且相对于管状线性致动器的纵向轴线同心地布置的多个管状线圈；以及磁体组件，其包括在纵向方向上延伸并且具有交替极化方向的一系列永磁体，其中磁体组件至少部分布置在线圈组件中并且相对于线圈组件可移动，其中管状线圈包括边缘绕组。</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DYNAMO-ELECTRIC MACHINES ELECTRICITY ELECTROGRAPHY GENERATION HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS |
| title | TUBULAR LINEAR ACTUATOR, PATTERNING DEVICE MASKING DEVICE AND LITHOGRAPHIC APPARATUS |
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