TUBULAR LINEAR ACTUATOR, PATTERNING DEVICE MASKING DEVICE AND LITHOGRAPHIC APPARATUS

The present invention provides a tubular linear actuator, comprising: a tubular coil assembly comprising multiple tubular coils arranged next to each other in longitudinal direction of the tubular linear actuator and concentric with respect to a longitudinal axis of the tubular linear actuator, and a magnet assembly comprising a series of permanent magnets with alternating polarization direction extending in the longitudinal direction, wherein the magnet assembly is at least partially arranged in the coil assembly and movably with respect to the coil assembly, wherein the tubular coils comprise edge windings. 本发明提供一种管状线性致动器，该管状线性致动器包括：管状线圈组件，其包括在管状线性致动器的纵向方向上彼此相邻并且相对于管状线性致动器的纵向轴线同心地布置的多个管状线圈；以及磁体组件，其包括在纵向方向上延伸并且具有交替极化方向的一系列永磁体，其中磁体组件至少部分布置在线圈组件中并且相对于线圈组件可移动，其中管状线圈包括边缘绕组。