Evaporation crucible
The invention discloses an evaporation crucible which comprises a crucible body, a heating assembly, a cover plate and a dispersing assembly for uniformly dispersing gas. The cover plate is provided with a plurality of discharge holes which are uniformly distributed; a containing cavity for containi...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses an evaporation crucible which comprises a crucible body, a heating assembly, a cover plate and a dispersing assembly for uniformly dispersing gas. The cover plate is provided with a plurality of discharge holes which are uniformly distributed; a containing cavity for containing organic materials is formed in the crucible body, and an opening matched with a base plate in size is formed in the top of the containing cavity; and the heating assembly, the dispersing assembly and the cover plate are sequentially installed and arranged in the containing cavity from bottom to top. A surface source evaporation mode is adopted, uniform diffusion of gas molecules is achieved through the dispersing assembly, and the purpose of increasing the utilization rate of organic materials is achieved.
本发明公开了一种蒸镀坩埚,包括坩埚本体、加热组件、盖板和用于均匀扩散气体的分散组件;所述盖板具有多个均匀分布的出料孔;所述坩埚本体内具有用于盛装有机材料的容置腔,所述容置腔顶部具有与基板尺寸相匹配的开口;所述加热组件、所述分散组件和所述盖板由下至上依次装设于所述容置腔内。本发明采用面源蒸镀的方式,利用分散组件实现气体分子的均匀扩散,达到提高有机材料利用率的目的。 |
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