Method for recycling sewage in silicon wafer processing industry

The invention relates to a method for recycling sewage in the silicon wafer processing industry. The method comprises a reverse osmosis treatment process and a front-end treatment process before the reverse osmosis treatment process; the reverse osmosis treatment process comprises the step of: intro...

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Bibliographische Detailangaben
Hauptverfasser: CHEN XIAODONG, GU JISONG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to a method for recycling sewage in the silicon wafer processing industry. The method comprises a reverse osmosis treatment process and a front-end treatment process before the reverse osmosis treatment process; the reverse osmosis treatment process comprises the step of: introducing the sewage treated by the front-end treatment process into a reverse osmosis membrane devicefor treatment. The reverse osmosis membrane device comprises a water inlet and a water outlet for discharging recycled water. A silicon online detector is installed at a water inlet of the reverse osmosis membrane device; the concentration of silicon in the sewage at the water inlet of the reverse osmosis membrane device is monitored in real time; detected silicon concentration information is fedback to a control system; the control system controls operation of the reverse osmosis membrane device according to the received silicon concentration information. The membrane flux of a reverse osmosis membrane is correspondi