Method for drying and activating resin in polycrystalline silicon production

The invention discloses a method for drying and activating resin in polycrystalline silicon production, and belongs to the technical field of polycrystalline silicon production. According to the technical scheme, a chlorosilane buffer tank, a chlorosilane storage tank, a reaction column, pipelines,...

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Bibliographische Detailangaben
Hauptverfasser: LUO ZHOU, MU YAPING, LI BIN, XIANG CHUNLIN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a method for drying and activating resin in polycrystalline silicon production, and belongs to the technical field of polycrystalline silicon production. According to the technical scheme, a chlorosilane buffer tank, a chlorosilane storage tank, a reaction column, pipelines, a regulation and control method, a flow meter, a thermometer, a pressure gauge, a liquid level meterand the like are arranged in the system, the resin is dried by adopting gas-phase chlorosilane, and the resin is activated by adopting liquid-phase chlorosilane, so that the phenomena that the activation effect is not ideal, the detection is unqualified, a small amount of water wrapped by the resin is not dried and removed, a very violent reaction occurs when equipment is put into use and the like are effectively avoided, and meanwhile, the resin activation efficiency and safety are also improved. 本发明公开了一种用于多晶硅生产中树脂的干燥及活化方法,属于多晶硅生产技术领域。在本技术方案中,基于系统中氯硅烷缓冲罐、氯硅烷储罐、反应柱、各管线、调控法、流量计、温度计、压力表及液位计等设置,采用气相氯硅烷实现对树脂的干燥,采用液相氯硅烷实现