MEASURING METHOD AND MEASURING DEVICE

This measuring method of the present disclosure includes: a step for measuring a displacement (A1); a step for placing an imaging unit (20) in a position where it is possible to do imaging of a measurement mark (M1); and a step for imaging the measurement mark (M1). The step for measuring the displa...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MIMURA YUJI, HIZUME HISANORI, MANABE EIJI, TSURUTA SHIGETO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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