Automatic dustproof transferring system in glove box

The invention relates to an automatic dustproof transferring system in a glove box. The transferring system comprises a main support plate and an adjustable support plate arranged on the main supportplate through a position adjustment mechanism, wherein a main drive shaft and a power mechanism for d...

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Bibliographische Detailangaben
Hauptverfasser: WANG LEI, DONG ZHAOSHENG, XIAN YUNFEI, ZHOU JUN, LI JIANHUA, XU HONGFEI, WANG GANLONG, WU PENG, WU MAOPU, ZHU JUN, WU QINGCAI, WU BAISHENG, WANG YUNFEI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to an automatic dustproof transferring system in a glove box. The transferring system comprises a main support plate and an adjustable support plate arranged on the main supportplate through a position adjustment mechanism, wherein a main drive shaft and a power mechanism for driving the main drive shaft to rotate are horizontally arranged on the adjustable support plate; aplurality of driven shafts in drive connection with the main drive shaft are longitudinally arranged on the main support plate; two ends of the driven shafts respectively extend to two sides of the main support plate and are provided with main driving wheels for transferring quartz substrates; and a plurality of auxiliary support wheels and guiding devices matched with the main driving wheels arefurther arranged on the main support plate. The transferring system is reasonable in design, stable to transfer, and capable of meeting the stability in transferring inside the glove box in the semiconductor chip production pro