Authentication method of green layout and risk judgment method of early warning point

The invention provides an authentication method of a green layout. The authentication method comprises the following steps: acquiring a first low-risk point on the layout; obtaining the layout shape of the current layer, the layout shape of the reference layer, the OPC analog value and the OPC corre...

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Bibliographische Detailangaben

Hauptverfasser:	MENG HONGLIN, ZHANG CHENMING, ZHU JUN, MENG CHUNXIA, QI XUERUI, WEI FANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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