Authentication method of green layout and risk judgment method of early warning point

The invention provides an authentication method of a green layout. The authentication method comprises the following steps: acquiring a first low-risk point on the layout; obtaining the layout shape of the current layer, the layout shape of the reference layer, the OPC analog value and the OPC corre...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MENG HONGLIN, ZHANG CHENMING, ZHU JUN, MENG CHUNXIA, QI XUERUI, WEI FANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides an authentication method of a green layout. The authentication method comprises the following steps: acquiring a first low-risk point on the layout; obtaining the layout shape of the current layer, the layout shape of the reference layer, the OPC analog value and the OPC corrected value of the first low-risk point, and establishing a first information base; obtaining an early warning point of the published layout, and judging whether the layout of the current layer of the early warning point is the same as the layout of the current layer in the first information base within a first range or not; if yes, judging whether the layout shape of the reference layer of the early warning point is the same as the layout shape of the reference layer in the first information base within a second range or not; if yes, judging whether the OPC analog value of the early warning point is the same as the OPC analog value in the first information base or not; if yes, judging whether the OPC corrected valu