Method arranging filaments of hot filament CVD diamond equipment

The invention provides a method for arranging filaments of hot filament CVD diamond equipment. The method specifically comprises the following steps of preparing a plurality of N hot filaments, arranging the hot filaments at the upper end part of a substrate, arranging the substrate at the upper end...

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Hauptverfasser: HAO CEN, DENG WENLI, SUN YUHU, SUN YUNTIAN, DENG FUMING
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention provides a method for arranging filaments of hot filament CVD diamond equipment. The method specifically comprises the following steps of preparing a plurality of N hot filaments, arranging the hot filaments at the upper end part of a substrate, arranging the substrate at the upper end part of a bottom plate, and enabling the distances T between the hot filaments to be different from the middle to two sides; carrying out acid-base corrosion treatment on the substrate on the bottom plate; putting the treated substrate into chemical vapor deposition equipment, and carrying out diamond coating deposition; and observing the diamond microtopography at four different positions of the substrate, analyzing the purity and grain orientation of the diamond, and testing the bonding strength of the diamond coating and the substrate and the diamond microtopography and purity of the central substrate. According to the method for arranging the filaments of the hot filament CVD diamondequipment, by improving the