Hydrogen ion catcher, ammonium sulfate prevention system, photoetching system and ammonium sulfate prevention method

The invention discloses a hydrogen ion catcher, an ammonium sulfate prevention system, a photoetching system and an ammonium sulfate prevention method. The ammonium sulfate prevention system comprisesa thin film and the hydrogen ion catcher, wherein the thin film is arranged on the mask bottom surface of a mask plate and defines a closed space with the mask bottom surface, and the closed space surrounds a film of the mask plate; and the hydrogen ion catcher is respectively communicated with the two sides of the closed space through two pipelines. The hydrogen ion catcher comprises a shell, anelectrolyte container arranged in the shell, a hydrated gel layer, an electrode, a power supply module and a water collector. According to the ammonium sulfate prevention system, hydrogen ions in aircan be removed through the hydrogen ion catcher, the air with the hydrogen ions filtered out is input into the closed space defined by the thin film and the mask plate, and ammonia generated during exposure of the film is exha