SERS substrate based on surface plasmon polariton effect

The invention discloses an SERS substrate based on a surface plasmon polariton effect. The SERS substrate is of an MDM structure and comprises a SiO2 substrate layer, a layer of Au metal film is attached to the SiO2 substrate layer, a SiO2 dielectric layer is arranged on the Au metal film, and a lay...

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Bibliographische Detailangaben
Hauptverfasser:	LUO YINLONG, YI TIAN'AN, SU WEI, CHEN BINGYAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES MEASURING NANOTECHNOLOGY PERFORMING OPERATIONS PHYSICS SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	The invention discloses an SERS substrate based on a surface plasmon polariton effect. The SERS substrate is of an MDM structure and comprises a SiO2 substrate layer, a layer of Au metal film is attached to the SiO2 substrate layer, a SiO2 dielectric layer is arranged on the Au metal film, and a layer of Au top metal film is arranged on the SiO2 dielectric layer. According to the invention, the SERS substrate based on the surface plasmon polariton effect is manufactured by utilizing SiO2 and the Au metal film such that the detection sensitivity of SERS is greatly improved. 一种基于表面等离子体激元效应的SERS基底，所述SERS基底为MDM结构，包括SiO2基底层，所述SiO2基底层上附着一层Au金属薄膜，所述Au金属薄膜上设置有一层SiO2介质层，所述SiO2介质层上设置有一层Au顶层金属薄膜。本发明利用SiO2和Au金属薄膜制作了一种基于表面等离子体激元效应的SERS基底，极大地提高SERS的检测灵敏度。