Recovery system and method for trichlorosilane wet dust removal circulating liquid

The invention belongs to the technical field of trichlorosilane production, and discloses a recovery system and method for trichlorosilane wet dust removal circulating liquid. The recovery system comprises a hydrogen chloride preheater and a synthetic furnace, wherein a gas outlet of the hydrogen ch...

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Hauptverfasser: CHEN JIANXIANG, QIN XIAOYONG, CHANG CHENGSHENG, ZHANG SHIBIN, JIAO ZHIMIN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention belongs to the technical field of trichlorosilane production, and discloses a recovery system and method for trichlorosilane wet dust removal circulating liquid. The recovery system comprises a hydrogen chloride preheater and a synthetic furnace, wherein a gas outlet of the hydrogen chloride preheater is connected with a gas inlet of the synthetic furnace. The recovery system furthercomprises a gas flow drying tower, a catcher and a buffer tank, wherein the bottom of the gas flow drying tower is connected with the buffer tank, and a hydrogen chloride gas inlet is formed in the lower portion of the gas flow drying tower; the hydrogen chloride gas inlet is connected with a gas outlet of the hydrogen chloride preheater, the upper part of the airflow drying tower is provided with a wet dust removal circulating liquid spraying assembly, the top of the airflow drying tower is connected with a feeding hole in the lower part of the catcher, the bottom of the catcher is providedwith a discharge pipe, and