Infrared liquid crystal light valve with ultra-micro line spacing and manufacturing method thereof

The invention discloses an ultra-micro line spacing infrared liquid crystal light valve capable of effectively controlling the line spacing within 3 microns. Meanwhile, the invention provides a manufacturing method of the ultra-micro line spacing infrared liquid crystal light valve. The manufacturing method comprises a photoetching process, the photoetching process comprises a gluing process, a pre-drying process and an exposure process, in the gluing process, the film thickness is 0.9 +/- 0.15 mum, and the uniformity is greater than or equal to 90%; in the pre-drying process, the actual measurement temperature is 115 DEG C or above and is larger than or equal to 20 seconds, the highest temperature does not exceed 130 DEG C, in MASK exposure, the spacing is 15-30 microns, and the energy is80-140 mj/cm . 本发明公开了一种能有效将线间距控制于3um之内的超微线间距红外液晶光阀，同时提供一种该超微线间距红外液晶光阀的制造方法，该制造方法包括光刻工艺，所述光刻工艺包括涂胶工序、预烘工序和曝光工序，在所述涂胶工序中，膜厚：0.9±0.15um，均匀性≥90%；预烘工序中，实测温度115℃以上≥20秒，最高温度不超过130℃，MASK曝光中，间距15-30um，能量80-140mj/cm2。