Method for recovering precious metal from brazing precious metal residual targets
The invention discloses a method for recovering precious metal from brazing precious metal residual targets, and belongs to the technical field of sputtering target material processing. The method comprises the following steps of S1) providing a target material assembly which comprises a precious me...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a method for recovering precious metal from brazing precious metal residual targets, and belongs to the technical field of sputtering target material processing. The method comprises the following steps of S1) providing a target material assembly which comprises a precious metal target surface and a back plate brazed with the target surface, and separating the target surface of the target material from the back plate by using a physical method; S2) repeatedly immersing the precious metal target surface into an acid solution, so that the solder can be thoroughly separated from the target surface; and S3) cleaning the precious metal target surface in an ultrasonic cleaning machine, rinsing in absolute ethyl alcohol, and blow-drying to obtain the precious metal with the same purity as the residual target before use. The method provided by the invention can realize maximization of recycling of the precious metal residual target, the recovery rate reaches 99.8% or above, the precious metal |
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