Capacitive micro-electro-mechanical system microphone, microphone unit and electronic equipment

The embodiment of the invention provides a capacitive micro-electro-mechanical system microphone, a microphone unit and electronic equipment. The capacitive micro-electro-mechanical system microphoneincludes: a back electrode plate; a diaphragm; and a spacer which is used for separating the back polar plate from the vibrating diaphragm, wherein the ratio of the static effective displacement of the vibrating diaphragm relative to the flat position to the thickness of the vibrating diaphragm is greater than or equal to 0.5 in a state of applying a working bias voltage. 本说明书实施例提供电容型微机电系统麦克风、麦克风单体及电子设备。该电容型微机电系统麦克风包括：背极板；振膜；以及间隔件，用于使得所述背极板和振膜间隔开，其中，在施加工作偏压的状态下，所述振膜相对于平整位置的静态有效位移与振膜的厚度的比值大于或等于0.5。