Composite passivation film of PERC battery, preparation method and PERC battery

The invention discloses a composite passivation film of a PERC battery, a preparation method of the composite passivation film and the PERC battery. The composite passivation film comprises a SiOX film, a SiOxNy film and a SiNx film which are deposited on the back surface of the battery, and the preparation method of the PERC cell comprises the following steps of preparing the composite passivation film on the back surface of the battery, carrying out double-surface oxidation deposition of the SiOx film on a silicon wafer, and sequentially depositing the SiOxNy film and the SiNx film on the back surface SiOx film. According to the PERC battery provided by the invention, a three-layer composite passivation film SiOx-SiOxNy-SiNx structure is adopted, so that the battery efficiency is improved; the EL test yield of the battery is improved, and the production cost is reduced; and moreover, consumables for preparing the passivation film are low in cost and good in safety. 本发明公开了一种PERC电池的复合钝化膜、制备方法及PERC电池，所述该复合钝化膜包