3D package structure and methods of forming same

An embodiment is a method including the steps: forming a first die package over a carrier substrate, the first die package comprising a first die, forming a first redistribution layer over and coupledto the first die, the first redistribution layer including one or more metal layers disposed in one...

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Bibliographische Detailangaben
Hauptverfasser: CHEN MENGZE, HUANG HUIMIN, LIU ZHONGXI, GUO XUANTING, LIN ZHIWEI, ZHENG MINGDA
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:An embodiment is a method including the steps: forming a first die package over a carrier substrate, the first die package comprising a first die, forming a first redistribution layer over and coupledto the first die, the first redistribution layer including one or more metal layers disposed in one or more dielectric layers, adhering a second die over the redistribution layer, laminating a firstdielectric material over the second die and the first redistribution layer, forming first vias through the first dielectric material to the second die and forming second vias through the first dielectric material to the first redistribution layer, and forming a second redistribution layer over the first dielectric material and over and coupled to the first vias and the second vias. The invention also provides a structure. 本发明提供一种方法,包括:在载体衬底上方形成第一管芯封装件,第一管芯封装件包括第一管芯,第一再分布层形成在第一管芯上方并耦接至第一管芯,第一再分布层包括设置在一层或多层介电层中的一层或多层金属层,第二管芯附着于再分布层上方,在第二管芯和第一再分布层上方层压第一介电材料,形成穿过第一介电材料至第二管芯的第一通孔,并且形成穿过第一介电材料至第一再分布层的第二通孔,以及在第一介电材料上方以及在第一通孔和