SLIT COATER

The invention aims to provide a slit coater with which a slit cap can be easily switched and a coating film with an arbitrary shape can be formed. This slit coater (1) has: a slit die (20) that has afixed die plate (24), a movable die plate (21) movable in the lengthwise direction relative to the fi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MIYAZAKI DAISUKE, FUKUI KATSUYUKI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention aims to provide a slit coater with which a slit cap can be easily switched and a coating film with an arbitrary shape can be formed. This slit coater (1) has: a slit die (20) that has afixed die plate (24), a movable die plate (21) movable in the lengthwise direction relative to the fixed die plate (24), and a slit-like nozzle (81) formed on a joining surface between the fixed die plate (24) and the movable die plate (21); a movable die plate sliding mechanism (23) for moving the movable die plate (21) to change the slit length of the slit-like nozzle (81); a slit die sliding mechanism (22) for moving the slit die (20) along a main frame (8); and a stage driving mechanism (12) for transporting a substrate (3), wherein the fixed die plate (24) and the movable die plate (21) are respectively provided with seam plates (76, 71) that are detachably fixed thereto and that specify the sizes of slit gaps G of the slit-like nozzle (81). 本发明提供能够容易地切换狭缝间隙,并能够形成任意形状的涂膜的狭缝涂布机。狭缝涂布机1包括:缝模20,其具有固定模板24、能够相对于固定模