Defect detection method, device and equipment and computer storage medium

The invention discloses a defect detection method, device and equipment, and a computer storage medium. The method comprises the steps of: constructing a target wafer with a calibrated defect size; acquiring a defect image corresponding to the target wafer, and acquiring a gray value of the defect image corresponding to the target wafer; determining a defect size calibrated by the target wafer soas to acquire a defect size mapping function according to the gray value of the defect image corresponding to the target wafer and the defect size calibrated by the target wafer; and acquiring the defect size corresponding to the to-be-tested wafer based on the defect size mapping function. Therefore, the defect size mapping function is obtained by utilizing the gray value of the defect image corresponding to the target wafer and the defect size calibrated by the target wafer, and then the defect of any size of the wafer is detected by utilizing the defect size mapping function and the gray value of the defect image i