Gas sensor and preparation method thereof

The invention provides a gas sensor and a preparation method thereof, and the gas sensor comprises a first packaging body which comprises a gas sensitive chip; a second packaging body arranged on oneside of the first packaging body in a stacked mode and comprising a packaging substrate and a functio...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WANG KUI, XIE JIANYOU, ZHANG HONG, MA XIAOBO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TESTING TRANSPORTING
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