Gas sensor and preparation method thereof

The invention provides a gas sensor and a preparation method thereof, and the gas sensor comprises a first packaging body which comprises a gas sensitive chip; a second packaging body arranged on oneside of the first packaging body in a stacked mode and comprising a packaging substrate and a functio...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WANG KUI, XIE JIANYOU, ZHANG HONG, MA XIAOBO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a gas sensor and a preparation method thereof, and the gas sensor comprises a first packaging body which comprises a gas sensitive chip; a second packaging body arranged on oneside of the first packaging body in a stacked mode and comprising a packaging substrate and a functional chip located on the bearing surface of the packaging substrate, wherein the gas sensitive chipand the functional chip are electrically connected with the packaging substrate. By means of the mode, the gas sensitive chip can be independently packaged into the first packaging body and then attached to the second packaging body packaged with the functional chip. 本申请提供了一种气敏传感器及其制备方法,该气敏传感器包括:第一封装体,包括气敏芯片;第二封装体,层叠设置于所述第一封装体一侧,包括封装基板和位于所述封装基板的承载面上的功能芯片,所述气敏芯片和所述功能芯片分别与所述封装基板电连接。通过上述方式,本申请能够将气敏芯片独立封装成第一封装体后贴装在封装有功能芯片的第二封装体上。