Superlattice very long wave infrared detector structure

A very long wave infrared detector structure based on antimonide superlattices comprises the following structures from bottom to top: a substrate, a buffer layer, a very long wave band absorption layer, a medium long wave band barrier layer, a very long wave band ohmic contact layer and a top cover layer. The buffer layer is arranged on the substrate in an epitaxial manner. The antimonide superlattice very long wave infrared detector provided by the invention has good carrier transport performance. According to the invention, homotype junctions and segmented doping are introduced, and the superlattice structure, the doping concentration and the thickness of each region are regulated and controlled to obtain the infrared detector structure with high comprehensive detection rate. 一种基于锑化物超晶格的甚长波红外探测器结构，包括从下到上的以下结构：衬底，缓冲层，甚长波波段吸收层，中长波波段势垒层，甚长波波段欧姆接触层，顶盖层；缓冲层外延于所述衬底之上；本发明拥有良好载流子输运性能的锑化物超晶格甚长波红外探测器。本发明引入了同型结和分段掺杂，同时对各个区域超晶格结构，掺杂浓度和厚度进行了调控以得到高综合探测率的红外探测器结构。